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OAI
685 River Oaks Parkway
San Jose, CA 95134 USA
phone: 1-408-232-0600
fax: 1-408-433-9904
www.oainet.com
Booth 48
OAI designs and manufactures equipment for MEMS, Nanotechnology and Microfluidics. Products include: front & backside mask aligners, UV lightsources, Nano Imprint System (NIL), and Wafer Bonders for both R&D through production. Also available are modules and materials for Microfluidic Device prototypes or production. Recently added to the OAI product line are HF vapor etchers for dry release, IR Microscope for Inspection, and chip to chip bonders. OAI maintains sales, engineering and service support worldwide.
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