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Tango Systems, Inc.
2363 Bering Drive
San Jose, CA 95131 USA
phone: 1-408-526-2330
fax: 1-408-526-2336
www.tangosystemsinc.com
Booth 51
Tango Systems Inc. designs, manufactures, and sells the AXCELA™ PVD system including the platform and chambers for diverse metallization applications as well as nitride and oxide film depositions. These applications cover advanced packaging and MEMS. Capable of accommodating 150mm/200mm/300mm wafers, the AXCELATM system provides high degree of configurability, flexibility, thus highly versatile for metallization/MEMS applications ranging from high step coverage in the 3-D chip integration to F-bar/SAW types of devices.
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