Veeco Metrology Group 2650 East Elvira Road Tucson, AZ 85706 USA tel: 520-741-1044 fax: 520-294-1799 info@veeco.com www.veeco.com Veeco provides comprehensive 3D metrology for MEMS characterization. The new Dynamic MEMS (DMEMS) option for Wyko NT1100 Optical Profilers characterizes micro-devices in 3D as the actuate, for assessment of true device functionality. The Dektak 8 stylus profiler offers long-scan, 3D analysis of MEMS with up to 1 mm vertical height range.