Transducers 2009 - Denver, Colorado, USA
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Short Courses


Micro Energy

Optical MEMS

Integrated Biosensors


Title: Optical MEMS and Bio-Nano-Photonics
Time: 1:00 p.m. - 5:00 p.m.

Overview of Ming C. Wu's short course:

This short course will present a comprehensive overview of the Optical MEMS and bio-nano-photonics technologies. There is increasing interest in the development and application of Optical MEMS. In addition to the well-known digital micromirror device (DMD) for projection display, new displays based on interference modulation and micro shutter array are being developed for mobile devices. They are also increasingly used in telecommunications (2D and 3D switches, reconfigurable wavelength add-drop, tunable lasers/detectors) and imaging (micromirror scanners, adaptive optics, dynamic focus control). After an introduction to the fundamentals of free-space and guided-wave optics, we will describe the Optical MEMS devices for various applications in detail. In addition to free-space systems, planar lightwave circuits (PLC) and the emerging Si photonics platforms will be introduced. The latter enables the monolithic integration of electronic, photonic, and potentially MEMS circuits on a CMOS platform.

Optofluidics is an emerging technology that combines microfluidic and optical circuits on the same substrate to synthesize new functionalities. Microfluidics provides a new mechanism to control light. For example, compact tunable lens (such as zoom lens) can be realized by changing the shape of microfludic lenses. Displays using electrophoresis (electronic paper) and electrowetting will be discussed. Conversely, light can be used to control or enhance microfluidic circuits. Optical trapping using laser tweezers and novel optoelectronic tweezers will be discussed.

The last subject covers nanophotonics and its applications in bio and chemical sensing. The fundamentals of nanophotonics, including photonic crystals and high-Q resonators, near-field optics, plasmonics, and optical antennas, will be introduced. Finally, we will discuss their applications in bioanalysis systems. Surface plasmon resonance (SPR) is commonly used to detect antibody-antigen reactions, enzyme substrate reactions, and DNA hybridization at the sensor surface. Nanofabricated plasmonic structures offer higher sensitivity and spatial resolution. Surface-enhanced Raman spectroscopy (SERS) will be discussed.

  • Introduction and overview
  • Fundamentals of optics
    • Free-space optics
    • Diffractive optics
    • Guided wave optics
  • Display
    • Projection display, digital micromirrors, scanning display
    • Flat panel display for portable devices
  • Telecommunication applications
    • 2D and 3D MEMS optical switches
    • Wavelength-selective switches and crossconnect
    • Wavelength-division-multiplexing (WDM) devices
    • Tunable lasers, detectors, modulators
  • Imaging and adaptive optics
    • Confocal scanning optical microscopy
    • Optical coherence microscopy
    • Endoscopic microscope
  • Optical interconnect
    • Waveguide-based optical interconnect
    • Free-space optical interconnect
  • Planar lightwave circuits (PLC)
    • Filters, WDM multiplexers, thermal optic switches
    • PLC MEMS
  • Si photonics
    • Electronic and photonic integrated circuits
    • Si photonic MEMS
  • Optofluidics
    • Electrowetting optics
    • Tunable lenses
    • Electronic papers
    • Optical trapping and manipulation, optical tweezers and optoelectronic tweezers
    • Lab-on-a-chip with optofluidics
  • Fundamentals of nanophotnics
    • Photonic crystals and resonators
    • Near-field optics
    • Plasmonics
    • Optical antennas
  • Bioanalysis systems
    • Resonance-enhanced biochemical sensors
    • Surface Plasmon resonance (SPR)
    • Surface-enhanced Raman spectroscopy (SERS)
Biography of Presenter:

Ming C. Wu is Professor of Electrical Engineering and Computer Sciences, and Co-Director of Berkeley Sensor and Actuator Center (BSAC) at the University of California, Berkeley. He is also Chief Scientist of CITRIS, and Director of UC Berkeley Microfabrication Laboratory. Dr. Wu received his M.S. and Ph.D. degrees in Electrical Engineering and Computer Sciences from the University of California, Berkeley in 1985 and 1988, respectively. From 1988 to 1992, he was a Member of Technical Staff at AT&T Bell Laboratories, Murray Hill, New Jersey. From 1992 to 2004, he was a professor in the Electrical Engineering department at the University of California, Los Angeles. He has been a faculty member at Berkeley since 2004. His research interests include MEMS (micro-electro-mechanical systems), MOEMS, semiconductor optoelectronics, nanophotonics, and biophotonics. He has published 7 book chapters, over 155 journal papers and 300 conference papers. He is the holder of 19 U.S. patents. Prof. Wu is a Fellow of IEEE, and a member of Optical Society of America. He was a Packard Foundation Fellow from 1992 to 1997. He received the 2007 Paul F. Forman Engineering Excellence Award from Optical Society of America.

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