Exhibit Hall Floorplan
Surface Technology Systems, PLC
Established in 1984, Surface Technology Systems plc (STS), a wholly owned subsidiary of Sumitomo Precision Products Co., Ltd (SPP), manufactures cassette-to-cassette cluster and single/batch loadlocked plasma etch and deposition systems that can be configured with ICP, RIE, XeF2 and PECVD sources. Their wafer processing technologies include the market-leading ASE® deep silicon etch process for MEMS micromachining, dielectric etch and deposition for Optical Waveguides, and compound semiconductor etch processes. STS and SPP have a worldwide distribution and service network of sales offices, service engineers and agents, to offer local sales, spares and service support throughout Asia, Europe and North America.
Newport, NP10 BUJ UK