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Oxford Instruments
North End, Yatton
Bristol, B54 94AP UK
phone: 1-44-1934-837-000
email: plasma@oxinst.com

Booth 16

We offer flexible process tools and leading-edge processes for the precise, controllable, repeatable etching, deposition and growth of micro- and nano-structures. Systems provide process solutions for the micro- and nanometre engineering of materials for MEMS, semiconductor, optoelectronics, HBLED & microfluidics, and many applications in micro- and nanotechnology.
  • Core technologies:
  • Plasma Etch & Deposition
  • Atomic Layer Deposition (ALD)
  • Ion Beam Etch & Deposition
  • Deep Silicon Etch

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