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685 River Oaks Parkway
San Jose, CA 95134 USA
phone: +1-408-232-0600
fax: +1-408-433-9904

Booth 41

OAI manufactures precision lithography equipment for MEMs, Microfluidics, Semiconductor and Nanotechnology. Products include table top mask aligners, UV and LED Light Sources, Front/backside optical 4 camera Mask Aligners with OAI's Advanced Beam Optics and fully automated Mask Aligners for production with higher throughput and lower cost of ownershIp. We are featuring the new enhanced high performance Model 800E Mask Aligner; the most technically advanced front and backside aligner for R&D and low volume production.

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