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OAI Lithography
685 River Oaks Parkway
San Jose, CA 95134 USA
phone: 1-408-232-0600
fax: 1-408-433-9904
email: sales@oainet.com

Booth 13

OAI introduces the NEW front/backside fully automated mask aligner for production, Model 6000, which features highly optimized yields, wedge effect leveling, cluster tool integration and superb process repeatability. Other featured products are the Semi-automatic four camera optical front/backside mask aligner for R&D and custom exposure systems. OAI maintains technical support and service world wide.

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